Ro-ràdh giùlan wafer
CATAGÓIR PRODUCT
▶Siostam giùlan wafer airson pròiseas PECVD & TALOX
• Bàta grafait PECVD & TALOX (M4~M12)
• Bàta SM dìreach (M4, M6)
• Pàirt grafait implant & fras (M4 ~ M6)
• Còmhdach C / C & Còmhdach Ceirmeach
• Metal RIE-Tray & Ceramic Coating
• Vacuum Sealing: O-Ring & SQ-Ring
▶Pròiseas gluasad teacsadh & sgrìobadh fliuch
• LSC H-Carrier no cassette (M4~M12)
• LSC V-Carrier no cassette (M4~M12)
• ASC Carrier no caisette (M4, M6)
• Bogsa giùlan is stòraidh W/F (M4 ~ M12)
• Sreath Cuibhle Còmhdhail (Roller).
▶Solar Cell Carrier & Metal Carrier
• TRC Carrier no cassette (M4~M12)
• Iris (le BELT)
BOAT GRAPHITE (Seòrsa H)
19P6-216CT (WF M4 ~ M12)
BOAT GRAPHITE (Seòrsa H)
21P6-240CT WF M4~M12)
BOAT GRAPHITE (Seòrsa H)
23P7-308CT (W/F M4 ~ M12)
BOAT GRAPHITE (Seòrsa H)
22P/7-294TP (W/F M4 ~ M12)
BOAT GRAPHITE (Seòrsa H)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF CARRIER & Storage Box (~ M12)
C/C TRAY no CARRIER (M4 ~ M10)
C/C TRAY no CARRIER (M4 ~ M10)
BOAT VERTICAL (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
Giùladair ASC (~M6)
Giùladair TRC (~ M12)
Giùladair TRC (~ M12)
GRAPHITE-BOAT(M12)
Siostam giùlan wafer airson pròiseas PECVD
▶ GRAPHITE BOAT (Deilbh CT) Pròiseas M10/M12
• Bun-bheachd DEARADH SÒNRAICHTE
▶ GRAPHITE BOAT (Deilbh CT) Pròiseas M4/M6
▶ Pàirtean accessory BOAT
▶ BOAT VERTICAL-161.7mm WAFER
▶ BOAT VERTICAL - WAFER 166mm
▶ BOAT VERTICAL-161.7mm, WAFER 166mm
Solar Cell Carrier & Metal TRC Carrier
TIP: fèin-ghluasad
MÒR WAFER: ① 156 × 156MM ② 156.75 × 156.75MM
③161.7x161.7MM ④ 166x166MM
⑤ 180 × 180mm ⑥ 210 × 210mm
CLEACHDADH: Carry (Casette)
Comas: 100 duilleag
PITCH: 4.76mm/5.953mm/6.35mm
Meud: Mu 559 × 220 × 220MM
Mu 712×260×260MM
Buannachd: Atmosphere
Stuth: FLAME, SIDE BAR-Aluminium (anodizing)
SIDE PLATE-POM (antistatic)
Còmhdach a’ bhàr ìosal-EPDM/PU/VITON (ASE)